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美國(guó)OAI 光功率計(jì)（Exposure Analyzer）
MODEL 358
This instrument is designed for use with the ASM High Intensity， Canon， Nikon， and Ultratech High Intensity Wafer Steppers. The microprocessor based Model 358 Exposure Analyzer performs measurement， storage and recall of nine series of readings. Reads intensity， energy， and time (1600 mW/cm2， 4000 mJ/cm2， 2.5 seconds maximum). For 365， 400， 420， and 436 nm wavelengths. Other wavelengths are available
APPLICATION
Perfect for a wide variety of industries where the precision measurement of UV energy is essential， the Model 358 is designed for any application requiring repeatable， reliable UV measurement.
FEATURES
• Digital Display provides clear measurements traceable to NIST
• Measures Intensity， Time， and Energy
• Records % deviation over a series of exposures
• Probe wavelength display helps prevent errors in setup
• Simple push button operation provides reliable results
• RS 232 output enables download/record of analyzer measurement results
• Detachable probes to match the spectral response of many photoresists
• Display readings can be frozen
• Front panel reminders prompt the user
• Rugged aluminum case features handle and probe pouch for portability
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