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 技術參數(shù)

Measuring head CX CI

Image acquistion module BM 512 Digital camera with progressive-

scan technology， up to 25fps，

512 x 512 Pixel， 8bit， Firewire Fast digital camera with progressive-

scan technology， up to 58fps，

512 x 512 Pixel， 12 Bit， Firewirs

light source， adjustable Halogen light source

(LS 100) Powerfull-Xe-light source

(LX 100， LX 180)

Scan modules 　

x， y-axis module MS 50 Precision x， y-table， 50 x 50mm， resolution 0.1μm

z-axis module ZM 100 Precision scanning module， range 100mm， resolution 0.1μm

z-axis module NV 350 - Fast precision scanning module (Piezo)，

measuring range 350μm， resolution < 1nm

Optic modules1) 1600 S 800 L / S / XS 320 L / S / XS 160 L / S

Measurement area (x/y)(um)2

(XY測量范圍) 1600 x 1600 800 x 800 320 x 320 160 x 160

Numerical aperture

(NA值) 0.3 0.4 / 0.46 / 0.6 0.5 / 0.8 / 0.95 0.8 / 0.95

Working distance(mm)

Z方向測量范圍 10.1 12 / 3.1 / 0.9 10.6 / 0.66 / 0.3 3.4 / 0.31

Resolution in z-direction(nm)CX

(Z方向范圍分辨率)　　　　 CI2) 50

20 35 / 30 / -

6 / 5 / 4 25 / 15 / -

4 / 2 / 2 -

2 / 1

Resolution in x，y-direction

(XY分辨率) 2.9 1.5 0.6 0.31

1) L : long working distance， S : normal working distance， XS : short working distance， 2) noise level (only with NV350)